client application

Lens assembly

demand

Linear motor bridge marble platform

composition

Double acting crossbeam, single axis

XYOrthogonal Cross

axis number

X1

X2/Y1

trip

840mm

110mm/300mm

Installation method

wall

level

load

10kg

5kg

Number of movers

2

oneMover

maximum speed

2m/s

1m/s

Maximum acceleration

1.5G

1G

Single axis reproduction accuracy

±0.5um

±0.5um

Single axis positioning accuracy (after compensation)

±0.5um

±0.5um

Straightness

≤5um

≤5um

Platform flatness

≤5um

The flatness after combination is within 5um

Parallelism between bridge seat and platform

≤5um

Verticality of bridges and platforms

≤5um

Platform external dimension tolerance

±1mm

other

Jinan green marble material;THK SHStypeHGrade guide rail; Built in grating; Cross combinationXYVerticality ≤5um; Igusdrag chain;X2The total length of the shaft shall not exceed340mmThe width shall not exceed117mmMarble countertop toXYThe height of axis superposition is167mmDrive built-in compensation; Omron or Panasonic photoelectric switch

Combination model

TLM3HX-B0952P-B0552S-B0752S-840-110-300-C111E

Single axis model

X1:TLM160-B0952P-2-0840-C111E

X2:TLM115-B0552S-1-0110-G111

Y: TLM140-B0752S-1-0300-G111E

Motor configuration

Feedback:RENISHAW 0.1umraster*2

Reading head:Q4BCY05D20A*2

Grating ruler: RTLC40-S*2

Zero point sticker: A-9653-0143*2

Driver:CDHD20062AAF1 *2

Encoder line:TLMSA-EHC-R-G-S-L05 *2

Power line:TLMSA-PWC-0.75-L05 *2

Feedback:RENISHAW 0.2umraster*2
Reading head:Atom4t0-300 *2
Subdivision box:RI0200A12B *2
Grating ruler: A-9407-0020 *1

Grating ruler: A-9407-0040 *1

Zero point sticker: A-9402-0049 *1

Driver:CDHD20032AAF1 *2

Encoder line:TLMSA-EHC-R-G-S-L05 *2

Power line:TLMSA-PWC-0.5-L05 *2